Active damping of the scanner for high-speed atomic force...

Active damping of the scanner for high-speed atomic force microscopy

Kodera, Noriyuki, Yamashita, Hayato, Ando, Toshio
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Volume:
76
Year:
2005
Language:
english
DOI:
10.1063/1.1903123
File:
PDF, 1.09 MB
english, 2005
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