Formation and Characterization of Self-Patterned PZT Film...

Ferroelectrics 2002 / 01 Vol. 273; Iss. 1

Formation and Characterization of Self-Patterned PZT Film for Applying to Micro-Mechanical Detecting System

Ha, Su-Min, Kim, Woo Sik, Park, Hyung-Ho, Kim, Tae Song
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Volume:
273
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/713716372
Date:
January, 2002
File:
PDF, 418 KB
english, 2002
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