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Thermal optimization of micro-hotplates that have a silicon island
Briand, Danick, Heimgartner, Stephan, Gr tillat, Marc-Alexis, Schoot, Bart van der, Rooij, Nicolaas F deVolume:
12
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/12/6/330
Date:
November, 2002
File:
PDF, 284 KB
english, 2002