Precursor for the Low-Temperature Deposition of Titanium...

Chemistry of Materials 1995 / 06 Vol. 7; Iss. 6

Precursor for the Low-Temperature Deposition of Titanium Phosphide Films

Lewkebandara, T. Suren, Proscia, James W., Winter, Charles H.
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Volume:
7
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00054a003
Date:
June, 1995
File:
PDF, 289 KB
english, 1995
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