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Physical and electrical properties of sputtered Ru 2 Si 3 /Si structures
Jelenkovic, Emil V, Tong, K Y, Cheung, W Y, Wong, S PVolume:
18
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/18/6/311
Date:
June, 2003
File:
PDF, 220 KB
english, 2003