Experimental Study of Interfacial Fracture Toughness in a SiN x /PMMA Barrier Film
Kim, Yongjin, Bulusu, Anuradha, Giordano, Anthony J., Marder, Seth R., Dauskardt, Reinhold, Graham, SamuelVolume:
4
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am301880y
Date:
December, 2012
File:
PDF, 3.41 MB
english, 2012