Injection molding of high aspect ratio sub-100 nm nanostructures
Matschuk, Maria, Larsen, Niels BVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025003
Date:
February, 2013
File:
PDF, 899 KB
english, 2013