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Three-Dimensional Nanofabrication with Elastomeric Phase Masks
Shir, Daniel J., Jeon, Seokwoo, Liao, Hongwei, Highland, Matthew, Cahill, David G., Su, Mehmet F., El-Kady, Ihab F., Christodoulou, Christos G., Bogart, Gregory R., Hamza, Alex V., Rogers, John A.Volume:
111
Language:
english
Journal:
The Journal of Physical Chemistry B
DOI:
10.1021/jp074093j
Date:
November, 2007
File:
PDF, 2.49 MB
english, 2007