Direct Patterning of Intrinsically Electron Beam Sensitive Polymer Brushes
Rastogi, Abhinav, Paik, Marvin Y., Tanaka, Manabu, Ober, Christopher K.Volume:
4
Language:
english
Journal:
ACS Nano
DOI:
10.1021/nn901344u
Date:
February, 2010
File:
PDF, 2.05 MB
english, 2010