Use of Multifunctional Carboxylic Acids and Hydrogen Peroxide To Improve Surface Quality and Minimize Phosphine Evolution During Chemical Mechanical Polishing of Indium Phosphide Surfaces
Matovu, John B., Ong, Patrick, Leunissen, Leonardus H. A., Krishnan, Sitaraman, Babu, S. V.Volume:
52
Language:
english
Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/ie400689q
Date:
August, 2013
File:
PDF, 1.24 MB
english, 2013