Measurement and modeling of N-atom behavior in the...

Measurement and modeling of N-atom behavior in the afterglow of a microwave plasma

Ta-Chin Wei, Lance R. Collins, Jonathan Phillips
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Volume:
42
Year:
1996
Language:
english
Pages:
10
DOI:
10.1002/aic.690420516
File:
PDF, 897 KB
english, 1996
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