A Comparison of PZT-Based and TiNi Shape Memory Alloy-Based...

Ferroelectrics 2004 / 01 Vol. 306; Iss. 1

A Comparison of PZT-Based and TiNi Shape Memory Alloy-Based MEMS Microactuators

LAI, BO-KUAI, KAHN, H., PHILLIPS, S. M., HEUER, A. H.
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Volume:
306
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150190490460867
Date:
January, 2004
File:
PDF, 1.04 MB
english, 2004
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