Porous low dielectric constant materials for...

Philosophical Transactions Mathematical Physical & Engineering Sciences 2006 / 01 Vol. 364; Iss. 1838

Porous low dielectric constant materials for microelectronics

Baklanov, M. R, Maex, K.
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Volume:
364
Language:
english
Journal:
Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences
DOI:
10.1098/rsta.2005.1679
Date:
January, 2006
File:
PDF, 518 KB
english, 2006
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