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Development of CMOS-MEMS in-plane magnetic coils for application as a three-axis resonant magnetic sensor
Chang, Chun-I, Tsai, Ming-Han, Sun, Chih-Ming, Fang, WeileunVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035016
Date:
March, 2014
File:
PDF, 3.40 MB
english, 2014