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Thermal Decomposition of NF3 by Ti, Si, and Sn Powders
Vileno, Elizabeth, LeClair, Michael K., Suib, Steven L., Cutlip, Michael B., Galasso, Francis S., Hardwick, Steven J.Volume:
7
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00052a012
Date:
April, 1995
File:
PDF, 634 KB
english, 1995