Thermal Decomposition of NF3 by Ti, Si, and Sn Powders

Thermal Decomposition of NF3 by Ti, Si, and Sn Powders

Vileno, Elizabeth, LeClair, Michael K., Suib, Steven L., Cutlip, Michael B., Galasso, Francis S., Hardwick, Steven J.
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Volume:
7
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00052a012
Date:
April, 1995
File:
PDF, 634 KB
english, 1995
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