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Nanoimprint and Lift-Off Process Using Poly(vinyl alcohol)
Nakamatsu, Ken-ichiro, Tone, Katsuhiko, Matsui, ShinjiVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.44.8186
Date:
November, 2005
File:
PDF, 150 KB
english, 2005