[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Temperature Dependence of Quality Factor in MEMS Resonators
Kim, B., Jha, C.M., White, T., Candler, R.N., Hopcroft, M., Agarwal, M., Park, K.K., Melamud, R., Chandorkar, S., Kenny, T.W.Year:
2006
Language:
english
DOI:
10.1109/memsys.2006.1627868
File:
PDF, 2.92 MB
english, 2006