Investigation of Damage Mechanisms in PMMA during ToF-SIMS Depth Profiling with 5 and 8 keV SF 5+ Primary Ions
Mahoney, Christine M., Kushmerick, James G., Steffens, Kristen L.Volume:
114
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp103938y
Date:
September, 2010
File:
PDF, 3.16 MB
english, 2010