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Effects of rapid thermal annealing on properties of HfAlO films directly deposited by ALD on graphene
Zheng, Li, Cheng, Xinhong, Cao, Duo, Wang, Zhongjian, Xu, Dawei, Xia, Chao, Shen, Lingyan, Yu, YuehuiVolume:
137
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2014.08.146
Date:
December, 2014
File:
PDF, 1.57 MB
english, 2014