Chemical vapor deposition precursor chemistry. 3. Formation and characterization of crystalline nickel boride thin films from the cluster-assisted deposition of polyhedral borane compounds
Kher, Shreyas S., Spencer, James T.Volume:
4
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00021a011
Date:
May, 1992
File:
PDF, 1.99 MB
english, 1992