![](/img/cover-not-exists.png)
Patterning of Self-Assembled Films Using Lithographic Exposure Tools
Dressick, Walter J., Calvert, Jeffrey M.Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.5829
Date:
December, 1993
File:
PDF, 4.36 MB
1993