Polymeric mask protection for alternative KOH silicon wet...

Polymeric mask protection for alternative KOH silicon wet etching

Canavese, G, Marasso, S L, Quaglio, M, Cocuzza, M, Ricciardi, C, Pirri, C F
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/022
Date:
July, 2007
File:
PDF, 983 KB
english, 2007
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