Polymeric mask protection for alternative KOH silicon wet etching
Canavese, G, Marasso, S L, Quaglio, M, Cocuzza, M, Ricciardi, C, Pirri, C FVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/022
Date:
July, 2007
File:
PDF, 983 KB
english, 2007