Intrinsic stress dependence of Pt hillock formation and its...

Integrated Ferroelectrics 1999 / 09 Vol. 25; Iss. 1-4

Intrinsic stress dependence of Pt hillock formation and its related electrical properties of SBT capacitor

Kweon, Soon Yong, Yeom, Seung Jin, Sun, Ho Jung, Kim, Nam Kyeong, Yu, Yong Sik, Lee, Sahang Kyoo
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Volume:
25
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589908210180
Date:
September, 1999
File:
PDF, 723 KB
english, 1999
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