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Characterization of sputtered BZT thin films for MCM: Multichip module
Nobuo Kamehara, Mineharu Tsukada, Jeffrey S. Cross, Kazuaki KuriharaVolume:
43
Year:
1997
Language:
english
Pages:
5
DOI:
10.1002/aic.690431333
File:
PDF, 514 KB
english, 1997