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Phosphorus vacancy cluster model for phosphorus diffusion gettering of metals in Si
Chen, Renyu, Trzynadlowski, Bart, Dunham, Scott T.Volume:
115
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4864377
Date:
February, 2014
File:
PDF, 759 KB
english, 2014