Efficient femtosecond laser micromachining of bulk 3C-SiC

Journal of Micromechanics and Microengineering 2005 / 09 Vol. 15; Iss. 9

Efficient femtosecond laser micromachining of bulk 3C-SiC

Farsari, M, Filippidis, G, Zoppel, S, Reider, G A, Fotakis, C
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Volume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/9/022
Date:
September, 2005
File:
PDF, 454 KB
english, 2005
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