VO2 Films Prepared by Atomic Layer Deposition and RF...

ECS Transactions 2013 / 08 Vol. 58; Iss. 10

VO2 Films Prepared by Atomic Layer Deposition and RF Magnetron Sputtering

Tangirala, M., Zhang, K., Nminibapiel, D., Pallem, V., Dussarrat, C., Cao, W., Adam, T. N., Johnson, C. S., Elsayed-Ali, H., Baumgart, H.
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Volume:
58
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05810.0049ecst
Date:
August, 2013
File:
PDF, 9.41 MB
english, 2013
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