Impact of Plasma Pretreatment and Pore Size on the Sealing...

Langmuir 2014 / 04 Vol. 30; Iss. 13

Impact of Plasma Pretreatment and Pore Size on the Sealing of Ultra-Low- k Dielectrics by Self-Assembled Monolayers

Sun, Yiting, Krishtab, Mikhail, Struyf, Herbert, Verdonck, Patrick, De Feyter, Steven, Baklanov, Mikhail R., Armini, Silvia
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Language:
english
Journal:
Langmuir
DOI:
10.1021/la404165n
Date:
April, 2014
File:
PDF, 4.96 MB
english, 2014
Conversion to is in progress
Conversion to is failed