Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1997 Vol. 15; Iss. 1
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Critical Review: Adhesion in surface micromechanical structures
Maboudian, RoyaVolume:
15
Year:
1997
Language:
english
DOI:
10.1116/1.589247
File:
PDF, 8.38 MB
english, 1997