Effect of Catalyst Layer Density and Growth Temperature in...

ACS Applied Materials & Interfaces 2011 / 05 Vol. 3; Iss. 5

Effect of Catalyst Layer Density and Growth Temperature in Rapid Atomic Layer Deposition of Silica Using Tris( tert -pentoxy)silanol

Won, Seok-Jun, Kim, Joon Rae, Suh, Sungin, Lee, Nae-In, Hwang, Cheol Seong, Kim, Hyeong Joon
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Volume:
3
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am200176j
Date:
May, 2011
File:
PDF, 1.02 MB
english, 2011
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