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[IEEE 2012 Microsystems for Measurement and Instrumentation (MAMNA) - Annapolis, MD, USA (2012.03.27-2012.03.27)] 2012 Microsystems for Measurement and Instrumentation (MAMNA) - Traveling wave annular ultrasonic micromotors using bulk PZT
Hareesh, Prakruthi, Yang, Shuang, DeVoe, Don L.Year:
2012
Language:
english
DOI:
10.1109/mamna.2012.6195092
File:
PDF, 361 KB
english, 2012