XPS Investigation of the Atomic Layer Deposition Half...

Chemistry of Materials 2014 / 04 Vol. 26; Iss. 8

XPS Investigation of the Atomic Layer Deposition Half Reactions of Bis(N- tert -butyl-N′-ethylpropionamidinato) Cobalt(II)

Elko-Hansen, Tyler D.-M., Ekerdt, John G.
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Volume:
26
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm5002237
Date:
April, 2014
File:
PDF, 2.47 MB
english, 2014
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