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Piezoresistive friction force sensor for tribological research
Burger, Johannes, Berenschot, Erwin, Burger, Gert-Jan, Visscher, Harm, Elwenspoek, MikoVolume:
8
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/8/2/023
Date:
June, 1998
File:
PDF, 245 KB
english, 1998