Negative Bias Temperature Instabilities induced in devices with millisecond anneal for ultra-shallow junctions
Moras, M., Martin-Martinez, J., Rodriguez, R., Nafria, M., Aymerich, X., Simoen, E.Volume:
101
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2014.06.036
Date:
November, 2014
File:
PDF, 1.44 MB
english, 2014