FORMATION OF Si NANOSTRUCTURES USING DRY ETCHING WITH...

Integrated Ferroelectrics 2006 / 11 Vol. 78; Iss. 1

FORMATION OF Si NANOSTRUCTURES USING DRY ETCHING WITH SELF-ORGANIZED METAL OXIDE NANOPILLAR MASKS

PARK, IK HYUN, LEE, JANG WOO, CHUNG, CHEE WON
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Volume:
78
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580600660561
Date:
November, 2006
File:
PDF, 1.95 MB
english, 2006
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