Oxidized Titanium as a Bottom Electrode Adhesion Layer for...

Integrated Ferroelectrics 2002 / 01 Vol. 45; Iss. 1

Oxidized Titanium as a Bottom Electrode Adhesion Layer for the Multilayer (Ba,Sr)TiO 3 Capacitors

Koutsaroff, I. P., Zelner, M., Woo, P., Mcneil, L., Buchbinder, M., Cervin-Lawry, A.
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Volume:
45
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580215339
Date:
January, 2002
File:
PDF, 738 KB
english, 2002
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