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Synthesis and evaluation of copolymers of (tert-butoxycarbonyloxy)styrene and (2-nitrobenzyl)styrene sulfonates: single-component chemically amplified deep-UV imaging materials
Hanson, J. E., Reichmanis, E., Houlihan, F. M., Neenan, T. X.Volume:
4
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00022a018
Date:
July, 1992
File:
PDF, 1.61 MB
english, 1992