Atmospheric Pressure Atomic Layer Epitaxy of ZnO Using a...

Chemistry of Materials 2001 / 06 Vol. 13; Iss. 6

Atmospheric Pressure Atomic Layer Epitaxy of ZnO Using a Chloride Source

Kaiya, Kazuhiko, Yoshii, Naoki, Omichi, Kouji, Takahashi, Naoyuki, Nakamura, Takato, Okamoto, Shinji, Yamamoto, Hajime
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Volume:
13
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm0006594
Date:
June, 2001
File:
PDF, 104 KB
english, 2001
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