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Fabrication and characterization of a microsystem for a micro-scale heat transfer study
Jiang, Linan, Wang, Yuelin, Wong, Man, Zohar, YitshakVolume:
9
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/9/4/320
Date:
December, 1999
File:
PDF, 468 KB
english, 1999