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Effects of chemical composition on the electrical properties of NO-nitrided SiO2
Bhat, M., Han, L. K., Wristers, D., Yan, J., Kwong, D. L., Fulford, J.Volume:
66
Year:
1995
Language:
english
DOI:
10.1063/1.113244
File:
PDF, 259 KB
english, 1995