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Radiation damage distributions for 300 keV antimony ions implanted into silicon
Jakub Tatarkiewicz, Janusz Krynicki, Rainer Grötzschel, Krzysztof PaprockiVolume:
107
Year:
1985
Language:
english
Pages:
3
DOI:
10.1016/0375-9601(85)90245-2
File:
PDF, 248 KB
english, 1985