Annealing effect in structural and electrical properties of...

Applied Surface Science 2015 / 04 Vol. 334

Annealing effect in structural and electrical properties of sputtered Mo thin film

Chelvanathan, P., Zakaria, Z., Yusoff, Y., Akhtaruzzaman, M., Alam, M.M., Alghoul, M.A., Sopian, K., Amin, N.
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Volume:
334
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.08.154
Date:
April, 2015
File:
PDF, 2.43 MB
english, 2015
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