Design of Experiment for Optimization of Plasma-Polymerized...

Langmuir 2006 / 11 Vol. 22; Iss. 24

Design of Experiment for Optimization of Plasma-Polymerized Octafluorocyclobutane Coating on Very High Aspect Ratio Silicon Molds

Yeo, L. P., Yan, Y. H., Lam, Y. C., Chan-Park, Mary B.
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Volume:
22
Language:
english
Journal:
Langmuir
DOI:
10.1021/la061334q
Date:
November, 2006
File:
PDF, 419 KB
english, 2006
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