Anomalous defect drift induced in semiconductor crystals at...

Anomalous defect drift induced in semiconductor crystals at ion implantation and pulsed laser annealing

T.A. Kuzemchenko, A.A. Manenkov, G.N. Mikhailova, S.Yu. Sokolov
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Volume:
129
Year:
1988
Language:
english
Pages:
5
DOI:
10.1016/0375-9601(88)90141-7
File:
PDF, 432 KB
english, 1988
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