X-ray Absorption Spectroscopy To Probe Surface Composition...

Langmuir 2005 / 04 Vol. 21; Iss. 9

X-ray Absorption Spectroscopy To Probe Surface Composition and Surface Deprotection in Photoresist Films

Lenhart, Joseph L., Fischer, Daniel A., Sambasivan, Sharadha, Lin, Eric K., Jones, Ronald L., Soles, Christopher L., Wu, Wen-li, Goldfarb, Dario L., Angelopoulos, Marie
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Volume:
21
Language:
english
Journal:
Langmuir
DOI:
10.1021/la047160z
Date:
April, 2005
File:
PDF, 303 KB
english, 2005
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