Synthesis and Characterization of Templating Low Dielectric Constant Organosilicate Films
Yu, Suzhu, Wong, Terence K. S., Hu, Xiao, Pita, Kantisara, Ligatchev, ValeriVolume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1688800
File:
PDF, 363 KB
english, 2004