Engineering chemically abrupt high-k metal oxide∕silicon...

Engineering chemically abrupt high-k metal oxide∕silicon interfaces using an oxygen-gettering metal overlayer

Kim, Hyoungsub, McIntyre, Paul C., On Chui, Chi, Saraswat, Krishna C., Stemmer, Susanne
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Volume:
96
Year:
2004
Language:
english
DOI:
10.1063/1.1776636
File:
PDF, 616 KB
english, 2004
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