[IEEE 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2014.6.30-2014.7.4)] 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - 2D modeling of photoelectric part of silicon pressure sensor
Chernov, Artyom S., Chebanov, Mikhail A., Byalik, Alexander D., Gridchin, Viktor A., Vasilyev, Vladislav Yu.Year:
2014
Language:
english
DOI:
10.1109/edm.2014.6882479
File:
PDF, 372 KB
english, 2014