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Generally Applicable Self-Masked Dry Etching Technique for...

Nano Letters 2004 / 03 Vol. 4; Iss. 3

Generally Applicable Self-Masked Dry Etching Technique for Nanotip Array Fabrication

Hsu, Chih-Hsun, Lo, Hung-Chun, Chen, Chia-Fu, Wu, Chien Ting, Hwang, Jih-Shang, Das, Debajyoti, Tsai, Jeff, Chen, Li-Chyong, Chen, Kuei-Hsien
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Volume:
4
Language:
english
Journal:
Nano Letters
DOI:
10.1021/nl049925t
Date:
March, 2004
File:
PDF, 381 KB
english, 2004
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