Deposition of copper films on silicon substrates: Film...

Deposition of copper films on silicon substrates: Film purity and silicide formation

Padiyath, R., Seth, Jayshree, Babu, S. V., Matienzo, L. J.
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Volume:
73
Year:
1993
Language:
english
DOI:
10.1063/1.353137
File:
PDF, 1007 KB
english, 1993
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